ÀÛ¼ºÀÏ : 15-01-20 17:47
2005
|
|
±Û¾´ÀÌ :
Master
Á¶È¸ : 1,702
|
Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition, H. C. Lee, G. Y. Yeom, Y. J. Lee, J. K. Shin, S. Il Baik, and Y. W. Kim, J Korean Phys Soc 47 (2), 277 (2005).
|
|
|
|
|
|
¼¿ï½Ã °ü¾Ç±¸ °ü¾Ç·Î1 ¼¿ï´ëÇб³ 31µ¿ 411È£ ½Ç½Ã°£°üÂûÀüÀÚÇö¹Ì°æ ¿¬±¸½Ç Tel : 02-878-5010 | Fax : 02-878-5010
COPYRIGHT 2014. ALL RIGHT RESERVED |
In-situ Electron Microscopy Laboratory 31-411 Dept. of Materials Science and Engineering Seoul National University Gwanak-ro1 Gwanak-gu Seoul, Republic of Korea |
|
|