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ÀÛ¼ºÀÏ : 15-01-20 17:47
2005
 ±Û¾´ÀÌ : Master
Á¶È¸ : 1,702  
Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition, H. C. Lee, G. Y. Yeom, Y. J. Lee, J. K. Shin, S. Il Baik, and Y. W. Kim,  J Korean Phys Soc 47 (2), 277 (2005).

 
   
 

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In-situ Electron Microscopy Laboratory
31-411 Dept. of Materials Science and Engineering
Seoul National University
Gwanak-ro1 Gwanak-gu Seoul, Republic of Korea
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