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작성일 : 15-01-20 17:47
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2005
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글쓴이 :
Master
 조회 : 1,723
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Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition, H. C. Lee, G. Y. Yeom, Y. J. Lee, J. K. Shin, S. Il Baik, and Y. W. Kim, J Korean Phys Soc 47 (2), 277 (2005).
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서울시 관악구 관악로1 서울대학교 31동 411호
실시간관찰전자현미경 연구실
Tel : 02-878-5010 | Fax : 02-878-5010
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In-situ Electron Microscopy Laboratory
31-411 Dept. of Materials Science and Engineering
Seoul National University
Gwanak-ro1 Gwanak-gu Seoul, Republic of Korea |
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