ÀÛ¼ºÀÏ : 15-01-20 17:47
2005
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±Û¾´ÀÌ :
Master
Á¶È¸ : 1,725
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Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition, H. C. Lee, G. Y. Yeom, Y. J. Lee, J. K. Shin, S. Il Baik, and Y. W. Kim, J Korean Phys Soc 47 (2), 277 (2005).
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In-situ Electron Microscopy Laboratory 31-411 Dept. of Materials Science and Engineering Seoul National University Gwanak-ro1 Gwanak-gu Seoul, Republic of Korea |
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